JKSPE

Research on Dry Cooling and Processing Precision in Ultra-precision Machining
초정밀 가공에서 건식 냉각과 가공정밀도에 관한 연구

이경일/송원대학교

Keywords: Ultra-precision positioning (초정밀위치제어) Dry cooling system (건식냉각시스템) Piezoelectric actuator (압전구동기) Flexure hinge (유연힌지)
Recently, with the development of the space, mobility, semiconductor, and precision machinery industries, the processing of precision mechanical parts has been recognized as an important and a high value-added technology. Research on ultra-precision processing is actively underway to produce such products. In addition, eco-friendliness and 0% carbon are emerging as key keywords in modern industrial society, and the need for this is also increasing in the ultra-precision processing field. As the industry advances, environmental issues are becoming a major concern, and in the processing technology field, environmental destruction caused by cutting oil is becoming an issue. To solve this problem, this study measured the movement precision of the global feed system and instaled a Fine Servo that corrects the nm-level movement of the feed system in real time, using a piezoelectric actuator, to finely drive the cutting tool to control the movement necessary for machining. We intended to control variables for ultra-precision machining and measure cutting heat generation in real time to establish a dry cooling method using thermoelectric elements without using cutting oil.